JPH0213484Y2 - - Google Patents
Info
- Publication number
- JPH0213484Y2 JPH0213484Y2 JP11519185U JP11519185U JPH0213484Y2 JP H0213484 Y2 JPH0213484 Y2 JP H0213484Y2 JP 11519185 U JP11519185 U JP 11519185U JP 11519185 U JP11519185 U JP 11519185U JP H0213484 Y2 JPH0213484 Y2 JP H0213484Y2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- voltage
- heating
- coils
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 15
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- General Induction Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11519185U JPH0213484Y2 (en]) | 1985-07-29 | 1985-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11519185U JPH0213484Y2 (en]) | 1985-07-29 | 1985-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6223855U JPS6223855U (en]) | 1987-02-13 |
| JPH0213484Y2 true JPH0213484Y2 (en]) | 1990-04-13 |
Family
ID=30998609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11519185U Expired JPH0213484Y2 (en]) | 1985-07-29 | 1985-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213484Y2 (en]) |
-
1985
- 1985-07-29 JP JP11519185U patent/JPH0213484Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6223855U (en]) | 1987-02-13 |
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